Characteristics of crystal phases and antase-rutile phase transformation in multi systems of TiO 2 SiO 2, TiO 2 ZrO 2, TiO 2 SiO 2 ZrO 2 were studied at specific temperatures by XRD, FTIR, DTA. Quite different from what occurring in traditional solid reaction, in all these multi systems of Sol Gel process, anatase solid solution appears at certain compositions. Following the compositional variation of anatase solid solution, both nano crystalline size and temperature of phase transformation have changes.